固体撮像素子用カラーフィルタ

Color filter for solid-state image sensing device

Abstract

<P>PROBLEM TO BE SOLVED: To provide a color filter for a solid-state image sensing device in which even in the pixels of 5μm in size there is no recessed portion in the central part of an upper portion of the second and the subsequent order colorant pixels, there is no difference in a planar shape compared with that of the colorant pixel of the first color, there is no large variation between the colorant pixels in an identical color of the second and the subsequent order colors, i.e., there occurs no variation in sensitivity between the colors and the colorant pixels in an identical color, and therefore there occurs no unevenness of sensitivity and no noise. <P>SOLUTION: In the color filter for the solid-state image sensing device, film thicknesses of the second and the subsequent order colors that are arranged adjacently in sides of the colorant pixels are larger than the film thickness of the colorant pixel arranged in the first color of the color filter. Difference between the film thicknesses is 0.03μm to 0.5μm. <P>COPYRIGHT: (C)2004,JPO
【課題】5μm以下の画素サイズであっても、第2色目以降の色素画素の上部の中央部におちこみがなく、平面形状は、第1色目の色素画素の平面形状に比べ差がなく、第2色目以降の同一色内の色素画素間でのバラツキが大きくない、すなわち、色間、及び同一色内の色素画素間で、感度のバラツキを生ぜず、従って、感度ムラやノイズが発生することのない固体撮像素子用カラーフィルタを提供すること。 【解決手段】固体撮像素子用カラーフィルタにおいて、カラーフィルタの第1色目に配設された色素画素の膜厚に対し、色素画素の辺に隣接して配置された第2色目以降の色素画素の膜厚が厚いこと。その膜厚との膜厚差が0.03μm〜0.5μmであること。 【選択図】図2

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    JP-2006040948-AFebruary 09, 2006Canon Inc, キヤノン株式会社Imaging apparatus