シリカ微粒子と低屈折率膜形成用塗料、及び低屈折率膜とその製造方法、並びに反射防止膜

Silica fine particle, coating material for low refractive index film formation, low refractive index film and method for manufacturing the same, and antireflection film

Abstract

【課題】機械的強度に優れかつ屈折率の小さいシリカ微粒子、機械的強度、耐擦傷性、透明性に優れた低屈折率膜を形成するための低屈折率膜形成用塗料、このシリカ微粒子を含有することで機械的強度、耐擦傷性、透明性に優れた低屈折率膜とその製造方法、高い透明性、優れた反射防止効果、高い膜強度を有する反射防止膜を提供する。 【解決手段】本発明のシリカ微粒子は、細孔を有し、空隙率が30〜90%であり、かつ1次粒子の平均径が5〜100nmであることを特徴とする。 【選択図】 なし
PROBLEM TO BE SOLVED: To provide silica fine particles having excellent mechanical strength and a low refractive index; a coating material for low refractive index film formation for forming a low refractive index film having excellent mechanical strength, scratch resistance and transparency; a low refractive index film exhibiting excellent mechanical strength, scratch resistance and transparency because of the fine silica particles contained therein and a method for manufacturing the same; and an antireflection film having high transparency, a remarkable antireflection effect and high film strength. SOLUTION: The silica fine particles has pores, a porosity of 30 to 90% and a mean diameter of primary particles of 5 to 100 nm. COPYRIGHT: (C)2004,JPO

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